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Theory of Operations
One methodology for an Internally Compensated Laminar (ICL) unit is based on the physics of the Poiseuille Equation. First an internal restriction is created. This restriction is known as a Laminar Flow Element (LFE). The LFE forces the gas molecules to move in parallel paths along the length of the passage, nearly eliminating flow turbulence (Figure 1). The differential pressure drop is measured within the laminar region. The Poiseuille Equation quantifies the relationship between pressure drop and flow as:

  Q = (P1 - P2)π r4 / 8ηL

Where:

  Q = Volumetric Flow Rate
  P1 = Static pressure at the inlet
  P2 = Static pressure at the outlet
  r = Hydraulic Radius of the restriction
  η = (eta) absolute viscosity of the fluid
  L = Length of the restriction

Since π, r and L are constant, the equation can be rewritten as:

  Q = K(Δ P/η)

In this equation, K is a constant factor determined by the geometry of the restriction. It shows the linear relationship between volumetric flow rate (Q), differential pressure (ΔP), and absolute viscosity (η) in a simpler form.

Changes in gas temperature affect the absolute viscosity of the gas. This requires a temperature measurement to determine the value of η. For most DP devices this is done by manually referencing charts that indicate the viscosity properties of the gas at given temperatures. In an ICL device this reference is performed internally through the use of a discrete temperature sensor and a microprocessor.

At this point only the volumetric flow rate has been determined. For an ICL device to address the range limitations of thermal devices, additional measurements must be taken to determine the actual mass flow rate of the gas. The relationship between volume flow and mass flow is:

Mass = Volume * Density Correction Factor

Ideal gas laws show us that the density of a gas is affected by its temperature and absolute pressure. Using ideal gas laws, the effect of temperature on density is:

   ρa / ρs = Ts / Ta

Where:

  ρa = Density @ Flow Condition
  Ta = Absolute Temperature @ Flow Condition in Kelvin
  ρs = Density @ Standard Condition
  Ts = Absolute Temperature @ Standard Condition in Kelvin
  °K = °C +273.15 (to find Kelvin)

And the effect of absolute pressure on density is:

   ρa / ρs = Pa / Ps

Where:

  ρa = Density @ Flow Condition
  Pa = Flow Absolute Pressure
  ρs = Density @ Standard Condition
  Ps = Absolute Pressure @ Standard Condition

Therefore, in order to determine the mass flow rate (M), two correction factors must be applied to volumetric flow rate: temperature effect on density, and absolute pressure effect on density. This can be written as:

  M = Q(Ts / Ta)( Pa / Ps)

In an ICL flowmeter a discrete absolute pressure sensor is also placed in the laminar region of the flow stream. This information is sent to the microprocessor and is combined with the data from the discrete absolute temperature sensor for the appropriate calculations to determine mass flow.

Performing these calculations requires reference to some standard temperature and pressure (STP) as indicated by variables Ts and Ps. STP is usually defined at sea level conditions, but no single standard exists for this convention. Examples of common reference conditions include:

  0 °C and 14.696 PSIA
  25 °C and 14.696 PSIA
  0 °C and 760 torr (mmHG)

It is relevant to note, while the correct units for mass are expressed in grams, kilograms, etc., it has become standard that the mass flow rate is specified in SLPM (standard liters per minute), SCCM (standard cubic centimeters per minute) or SCFH (standard cubic feet per hour). By knowing the STP calibration of the device and the density of a particular gas at that STP, it is possible to determine the flow rate in grams per minute, kilograms per hour, etc. For example:

Given:

Gas = Helium
M = 250 SCCM
STP = 25 °C and 14.696 PSIA
Gas Density = 0.166 Grams per Liter

True Mass Flow = M * Gas Density at STP
True Mass Flow = (250 SCCM)(1 liter per 1000 CC)(0.1636 grams per liter)
True Mass Flow = 0.0409 Grams per Minute of Helium
 
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