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Mass Flow Controllers |
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 Digital / Analog Gas Flow Controllers
Mass flow controllers (MFCs) were originally designed to take the guess work out of precision gas flow control. Today, the demand for
accurate and repeatable gas flow control has spanned dozens of industries. Demand for mass flow controllers is growing
and customers are requiring that MFCs are easy to use, fast, reliable, accurate, cost effective and robust.
The Alicat MC series mass flow controller is designed to meet the above requirements:
Simplicity
The MC series mass flow controller is very easy to use. With the local display, users can make changes to
the configuration of the unit without the need for computers, complicated software or scripts.
Mass Flow Controller Accuracy
Alicat MC series mass flow controllers can be configured with an accuracy spec of up to +/-(0.4% of reading + 0.2% of full scale) with a high-accuracy calibration.
Standard calibrations are rated at +/-(0.8% of reading + 0.2% of full scale)
Mass Flow Controller Repeatability
Alicat's patented technology allow its mass flow controllers to have very few moving parts. All of the MFC's internal components are
fixed in place resulting in very little physical change inside the MFC. Little physical change in the flow cavity means higher rates of
consistency and repeatability. Alicat MC series mass flow controllers have a repeatability of +/-0.2% of FS
Reduced Cost of Ownership
Alicat MC/MCP/MCR series and VC/VCP/VCR series flow controllers require very little power to run thereby reducing operating costs.
MC and VC series flow controllers also have less pressure drop when compared to similar flow devices. Reduced pressure drop means more process fluids go into your
process and not into your measurement devices. The MC series mass flow controllers also measure pressure, temperature and volumetric flow in addition to mass flow which means
fewer instruments you will have to buy and install.
Control Speed
The Alicat MC/MCP/MCR series mass flow controller has a response time of less than 10ms and a control time of 100ms
making it one of the fastest naturally responding mass flow controllers on the market today. See just how
quickly an Alicat MFC responds to changes in this short video.
Versatility
MC series mass flow controllers are available in any flow range from 0.5SCCM through 1500SLPM. The MFCs are
equipped with multiple analog outputs and inputs. Adding a totalizer allows users to see how much media has flowed
through the MFC, making it a great way to monitor usage and identify waste.
Alicat MC/MCP/MCR series MFCs can also be used in applications where flow control into a vacuum is critical. The modular design of
the Alicat MC/MCP/MCR series MFC allows it to be used in systems in which flow is driven by a vacuum.
Dependability
There are currently over 22,000 Alicat products in service around the world. Alicat mass flow controllers are being used in
processes like pharmaceutical and semiconductor manufacturing, fuel cell research, auto paint application, and emissions compliance equipment.
Alicat Scientific mass flow controller calibrations are NIST traceable.
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Features and Benefits of Alicat MC series mass flow controllers |
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 Measured Parameters
MC, MCP & MCR Series Mass Flow Controller products measure
- Mass Flow
- Volumetric Flow
- Pressure (PSIA)
- Temperature (° Celsius or ° Fahrenheit)
VC, VCP & VCR Series Volumetric Flow Meter products
Versatility
- Pressure and temperature measurements are taken and displayed in the same unit, alleviating the need for additional measurement devices. (MC, MCP & MCR Series)
- Mass flow controllers can be set by user to control pressure. It's like having 2 instruments in one. (MC, MCP & MCR Series)
- MFCs can be tuned for application specific control
- Multiple digital & analog inputs and outputs
- Digital and analog input and output available on the same device
- 100:1 Turndown ratio allows the MFC to measure flow at 1/100th of its full scale rating
- 30-Gas Select on all units to reduce inventory costs
- Control range from 1% to 100% of full scale flow
- Tunable P & D to fine tune instrument's speed of response
- Optional Remote Display allows for panel mount of the display with full push-button control in embedded applications
- Optional Remote Electronics allows devices to be installed in high heat applications by separating the flow element from the electronics.
- Ideal instrument for a variety of processes, including: Fuel cell testing, vacuum coating, sputtering, process automation, semiconductor processing, micro electro mechanical (MEMs), solar cell manufacturing and flame tip control, to name a few.
30 factory installed, user selectable, gas calibrations:
• Air
• Argon
• Methane
• Carbon Monoxide
• Carbon Dioxide
• Ethane
• Hydrogen
• Helium
• Nitrogen
• Nitrous Oxide
• Neon
• Oxygen
• Propane
• Butane
• Acetylene
• Ethylene
• Iso-Butane
• Krypton
• Xenon
• Sulfur Hexaflouride
• 75% Argon + 25% C02
• 90% Argon + 10% C02
• 92% Argon + 8% C02
• 98% Argon + 2% C02
• 75% Argon + 25% Helium
• 75% Helium + 25% Argon
• 75% CO2 + 25% Argon
• Helistar® A1025
• Stargon® CS
• 95% Argon + 5% CH4
Communication
• RS-232 output of all measured parameters
• RS-485 available
• PROFIBUS compatible communication standard
• DeviceNET compatible communication standard
• Choice of analog output of main parameter
• 0-5Vdc, 1-5Vdc, 0-10Vdc, or 4-20mA
• Local Setpoint
• RS-232 Setpoint
• Choice of analog Setpoint Control
• 0-5Vdc, 1-5Vdc, 0-10Vdc
• 4-20mA available
Customization
• Alternate STPs for gas units
• Lower pressure drops
• Totalization
• Gas blend calibrations
• Alternate Units of Measure (SCFM, Kg/M, etc)
• Downstream valve for vacuum applications
• Locking 6-pin electrical connection
• DB-15 connection
• No Display Units for OEMs
• Bi-directional flow
• Alarm drivers
• Class 1 Div 2 version available.
• ATEX Approved version available.
• Available with postive shut off valve. (MCV series) Ideal for high purity vacuum applications.
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Mass Flow Controller and Volumetric Flow Controller Literature |
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Accessories |
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| Accessories |
 Alicat Scientific provides a range of hardware and software accessories to accompany our product. These accessories can be added to an order to create an “out of the box” ready to use laboratory package, or to minimize the additional components required for an integrated application.
more >> | | | Get a Quote >> |
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HELP |
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 Are you not sure if an Alicat liquid flow controller is right for your application, or which series instrument to use?
Complete and submit an application assistance form
and an Alicat Scientific representative will contact you regarding the best course of action. Or,
contact Alicat to speak with an Alicat representative regarding your process and how
Alicat can help. |
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