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Digital / Analog Gas Flow Controllers

MC, MCP & MCR Series Laminar Mass Flow Controller Products

VC, VCP & VCR Series Laminar Volumetric Flow Controller Products

Mass flow controllers (MFCs) were originally designed to take the guess work out of precision gas flow control. Today, the demand for accurate and repeatable gas flow control has spanned dozens of industries. Demand for mass flow controllers is growing and customers are requiring that MFCs are easy to use, fast, reliable, accurate, cost effective and robust.

The Alicat MC series mass flow controller is designed to meet the above requirements:

  • Simplicity
    The MC series mass flow controller is very easy to use. With the local display, users can make changes to the configuration of the unit without the need for computers, complicated software or scripts.
  • Accuracy
    Alicat MC series mass flow controllers can be configured with an accuracy spec of up to +/-(0.4% of reading + 0.2% of full scale) with a high-accuracy calibration. Standard calibrations are rated at +/-(0.8% of reading + 0.2% of full scale)
  • Repeatability
    Alicat's patented technology allow its mass flow controllers to have very few moving parts. All of the MFC's internal components are fixed in place resulting in very little physical change inside the MFC. Little physical change in the flow cavity means higher rates of consistency and repeatability. Alicat MC series mass flow controllers have a repeatability of +/-0.2% of FS
  • Reduced Cost of Ownership
    Alicat MC/MCP/MCR series and VC/VCP/VCR series flow controllers require very little power to run thereby reducing operating costs. MC and VC series flow controllers also have less pressure drop when compared to similar flow devices. Reduced pressure drop means more process fluids go into your process and not into your measurement devices. The MC series mass flow controllers also measure pressure, temperature and volumetric flow in addition to mass flow which means fewer instruments you will have to buy and install.
  • Speed
    The Alicat MC/MCP/MCR series mass flow controller has a response time of less than 10ms and a control time of 100ms making it one of the fastest naturally responding mass flow controllers on the market today. See just how quickly an Alicat MFC responds to changes in this short video.
  • Versatility
    MC series mass flow controllers are available in any flow range from 0.5SCCM through 1500SLPM. The MFCs are equipped with multiple analog outputs and inputs. Adding a totalizer allows users to see how much media has flowed through the MFC, making it a great way to monitor usage and identify waste.
    Alicat MC/MCP/MCR series MFCs can also be used in applications where flow control into a vacuum is critical. The modular design of the Alicat MC/MCP/MCR series MFC allows it to be used in systems in which flow is driven by a vacuum.
  • Dependability
    There are currently over 22,000 Alicat products in service around the world. Alicat mass flow controllers are being used in processes like pharmaceutical and semiconductor manufacturing, fuel cell research, auto paint application, and emissions compliance equipment.
    Alicat Scientific mass flow controller calibrations are NIST traceable.
  • Mass Flow Controller and Volumetric Flow Controller Features

    Measured Parameters
    MC, MCP & MCR Series Mass Flow Controller products measure
    • Mass Flow
    • Volumetric Flow
    • Pressure (PSIA)
    • Temperature (° Celsius or ° Fahrenheit)
    VC, VCP & VCR Series Volumetric Flow Meter products
    • Volumetric Flow

    mass flow controller display
    All measured parameters are displayed in real time on digital display. Any measured parameter can be selected to the center of the display.
    Versatility
    • Pressure and temperature measurements are taken and displayed in the same unit, alleviating the need for additional measurement devices. (MC, MCP & MCR Series)
    • Mass flow controllers can be set by user to control pressure. It's like having 2 instruments in one. (MC, MCP & MCR Series)
    • MFCs can be tuned for application specific control
    • Multiple digital & analog inputs and outputs
    • Digital and analog input and output available on the same device
    100:1 Turndown ratio allows the MFC to measure flow at 1/100th of its full scale rating
    • 30-Gas Select on all units to reduce inventory costs
    • Control range from 1% to 100% of full scale flow
    • Tunable P & D to fine tune instrument's speed of response
    • Optional Remote Display allows for panel mount of the display with full push-button control in embedded applications
    • Optional Remote Electronics allows devices to be installed in high heat applications by separating the flow element from the electronics.
    • Ideal instrument for a variety of processes, including: Fuel cell testing, vacuum coating, sputtering, process automation, semiconductor processing, micro electro mechanical (MEMs), solar cell manufacturing and flame tip control, to name a few.
    Mass-Flow-Controller-Display
    30 factory installed, user selectable, gas calibrations:
        • Air
        • Argon
        • Methane
        • Carbon Monoxide
        • Carbon Dioxide
        • Ethane
        • Hydrogen
        • Helium
        • Nitrogen
        • Nitrous Oxide
        • Neon
        • Oxygen
        • Propane
        • Butane
        • Acetylene
        • Ethylene
        • Iso-Butane
        • Krypton
        • Xenon
        • Sulfur Hexaflouride
        • 75% Argon + 25% C02
        • 90% Argon + 10% C02
        • 92% Argon + 8% C02
        • 98% Argon + 2% C02
        • 75% Argon + 25% Helium
        • 75% Helium + 25% Argon
        • 75% CO2 + 25% Argon
        • Helistar® A1025
        • Stargon® CS
        • 95% Argon + 5% CH4
    mass flow controller gas select
    Communication
        • RS-232 output of all measured parameters
            (RS-485 available)
        • 0-5Vdc output of main parameter
        • Local Setpoint
        • RS-232 Setpoint
        • 0-5Vdc Setpoint

    Customization
        • Alternate STPs for gas units
        • Lower pressure drops
        • Totalization
        • Gas blend calibrations
        • Alternate Units of Measure (SCFM, Kg/M, etc)
        • Downstream valve for vacuum applications
        • Locking 6-pin electrical connection
        • DB-15 connection
        • No Display Units for OEMs
        • 0-10 volt DC output
        • 4-20mA current output
        • Bi-directional flow
        • Alarm drivers

    Request a Quote

    Click here to request a quote for an Alicat MC/MCP/MCR series mass flow controller using Alicat Scientific's online quote request system or contact Alicat to speak with an Alicat representative.

    Need Help?

    If you are not sure an Alicat MC/MCP/MCR series mass flow controller will work in your application, or which Alicat instrument to use? Click here to submit an application assistance form and an Alicat Scientific representative will contact you regarding the best course of action. Or, contact Alicat to speak with an Alicat representative regarding your process and how Alicat can help.

    Accessories

    Click here to see Alicat's full line of accessories for flow control products.

    Mass Flow Controller and Volumetric Flow Controller Literature

    Operating Manual
    Product Specification
      0.5SCCM to 50SCCM Full Scale
      50+ SCCM to 20SLPM Full Scale
      20+ SLPM to 100SLPM Full Scale P series valve
      20+ SLPM to 100SLPM Full Scale
      100+ SLPM to 1500SLPM Full Scale
    Mechanical Drawing
      0.5SCCM to 20SLPM Full Scale
      20+ SLPM to 250SLPM Full Scale
      250+ SLPM to 1500SLPM Full Scale
    3D Model
    Mass Flow Controller - 20 SLPM
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